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제품소개 > SEMI
Stacked X/Y/Z/T Vacuum stage: SEMI – SEM(Vacuum), Metrology; 제품문의하기 목록으로

상세정보

Structure: Stacked X/Y/Z/T Vacuum stage
Application: SEMI

•Wafer Ion-beam Milling

Specifications:

•Travel (Z,X,Y,T): 100 + 120 + 100 + 360°

•Max. Acceleration: 0.2G

•Max. Velocity: 100mm/s

•Position accuracy: ±200nm

•Bi-dir. Repeatability: ±100nm

•In-position stability: <±10nm

•Vacuum compatible: 1*10-7 Torr.(UHV)

Lead time: 20 weeks (production)

•Prototype : 2021.07